Sputtering
“Sputtering is a process whereby atoms are ejected from a solid target material due to bombardment of the target by energetic particles. It is commonly used for thin-film deposition, etching and analytical techniques.”
(Wikipedia, Sputtering, 12/16/2010)
Recent Journal Articles
10/29/2010
Structures and gas-sorption properties of carbonaceous film prepared by radio-frequency sputtering of polysaccharides pectin
(929-934) Polymer Degradation and Stability 95 #6 (2010
Sugimoto et al formed a carbonaceous films with microcolumnar layer by radio-frequency sputtering of polysaccharides pectin. The repeated sputtering has developed the densely packed seamless microcolumns, which are separated by the narrow grooves. The residual film stress has formed the honeycomb-patterned ridgesThe film surface is hydrophilic mainly due to the polar functional groups, such as the carboxyl and amino groups. (RDC 12/13/2010)